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	<description>Atomic-Level Semiconductor Cleaning Solution</description>
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		Comment on ALP™ &#8211; Atomic Level Purification by When the Foundation Cracks: How Pre-ALD Surface Defects Undermine Atomic Layer Deposition - SisuSemi		</title>
		<link>https://www.sisusemi.com/blog/alp-atomic-level-purification-3nm-interface-engineering/#comment-64</link>

		<dc:creator><![CDATA[When the Foundation Cracks: How Pre-ALD Surface Defects Undermine Atomic Layer Deposition - SisuSemi]]></dc:creator>
		<pubDate>Fri, 25 Sep 2026 05:22:16 +0000</pubDate>
		<guid isPermaLink="false">https://www.sisusemi.com/?p=919#comment-64</guid>

					<description><![CDATA[[&#8230;] ALP is not another cleaning step bolted onto the existing wet-clean-plus-plasma sequence. It is an ultra-high-vacuum, temperature-controlled purification and stabilization process applied upstream of ALD, designed to reset the silicon surface to a genuinely low-defect [&#8230;]]]></description>
			<content:encoded><![CDATA[<p>[&#8230;] ALP is not another cleaning step bolted onto the existing wet-clean-plus-plasma sequence. It is an ultra-high-vacuum, temperature-controlled purification and stabilization process applied upstream of ALD, designed to reset the silicon surface to a genuinely low-defect [&#8230;]</p>
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